1 result found
William Leipold Enosburg Falls, VT
Professions & Specialties
Scorer • Operations Manager
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6395438 May 28, 2002 Filed: Jan 8, 2001 |
James A. Bruce (Williston, VT) Orest Bula (Shelburne, VT) Edward W. Conrad (Jeffersonville, VT) William C. Leipold (Enosburg Falls, VT) | 09/756540 |
International Business Machines Corporation (Armonk, NY) |
| International Classification: | G03F 900 | 430 30, 430 5 |
Patent:
Method of etch bias proximity correction
Abstract:
A method for including etch bias corrections in pre-processing of integrated circuit design data to ...
Claim:
What is claimed is: 1. A method of etch-biasing of masks, comprising the steps of: characterizing...