1 result found
James Bruce Saint George, VT
Professions & Specialties
News Anchor • Commercial Announcer • Presenter
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6577406 Jun 10, 2003 Filed: Jan 17, 2002 |
James A. Bruce (Williston, VT) Orest Bula (Shelburne, VT) Emily E. Fisch (Burlington, VT) | 09/683551 |
International Business Machines Corporation (Armonk, NY) |
| International Classification: | G01B 1100 | 356625, 430 5 |
Patent:
Structure for lithographic focus control features
Abstract:
A control target structure and method for monitoring the lithographic affects on minimum feature in ...
Claim:
What is claimed is: 1. A process control target for a lithographic process which comprises: an...