40 results found
Eric Bergman Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6746565 Jun 8, 2004 Filed: Jan 7, 2000 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 09/478870 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | C23F 100 | 15634514, 15634512, 451 41, 451 66 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Claim:
We claim: 1. An apparatus for processing a semiconductor workpiece having a front face and a back...
Martin Bleck Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6746565 Jun 8, 2004 Filed: Jan 7, 2000 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 09/478870 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | C23F 100 | 15634514, 15634512, 451 41, 451 66 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Claim:
We claim: 1. An apparatus for processing a semiconductor workpiece having a front face and a back...
Timothy Reardon Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6746565 Jun 8, 2004 Filed: Jan 7, 2000 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 09/478870 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | C23F 100 | 15634514, 15634512, 451 41, 451 66 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Claim:
We claim: 1. An apparatus for processing a semiconductor workpiece having a front face and a back...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5174045 Dec 29, 1992 Filed: May 17, 1991 |
Raymon F. Thompson (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/703266 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F26B 1724 | 34 58 |
Patent:
Semiconductor processor with extendible receiver for handling multiple discrete wafers without...
Abstract:
A processor for centrifugal processing of semiconductor wafers and similar units without a wafer...
Eric Bergman Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5235995 Aug 17, 1993 Filed: Mar 6, 1991 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 7/665942 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 134105 |
Patent:
Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the...
Raymon Thompson Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5095927 Mar 17, 1992 Filed: Feb 8, 1991 |
Raymon F. Thompson (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/653886 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 302 | 134102 |
Patent:
Semiconductor processor gas-liquid separation
Abstract:
Rinser dryer system for rising process chemical from silicon or gallium arsenide wafers,...
Eric Bergman Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5357991 Oct 25, 1994 Filed: Apr 26, 1993 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 8/053523 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 1341021 |
Patent:
Gas phase semiconductor processor with liquid phase mixing
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the like ...
Raymon Thompson Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5221360 Jun 22, 1993 Filed: Jun 2, 1992 |
Raymon F. Thompson (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/893585 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 104 | 134 33 |
Patent:
Semiconductor processor methods
Abstract:
Rinser dryer system for rising process chemical from silicon or gallium arsenide wafers,...
Eric Bergman Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5377708 Jan 3, 1995 Filed: Apr 26, 1993 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 8/053524 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 134105 |
Patent:
Multi-station semiconductor processor with volatilization
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the like ...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5232328 Aug 3, 1993 Filed: Mar 5, 1991 |
Aleksander Owczarz (Kalispell, MT) Raymon F. Thompson (Kalispell, MT) | 7/665766 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B65H 7900 | 414222 |
Patent:
Robot loadable centrifugal semiconductor processor with extendible rotor
Abstract:
A processor for centrifugal processing of semiconductor wafers and similar units. The processor is ...
Timothy Reardon Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5357991 Oct 25, 1994 Filed: Apr 26, 1993 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 8/053523 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 1341021 |
Patent:
Gas phase semiconductor processor with liquid phase mixing
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the like ...
Daniel Durado Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5302120 Apr 12, 1994 Filed: Jun 15, 1992 |
Daniel L. Durado (Kalispell, MT) | 7/901613 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F23M 700 | 432250 |
Patent:
Door assembly for semiconductor processor
Abstract:
A door assembly for semiconductor processing equipment used to treat semiconductor substrates,...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5095927 Mar 17, 1992 Filed: Feb 8, 1991 |
Raymon F. Thompson (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/653886 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 302 | 134102 |
Patent:
Semiconductor processor gas-liquid separation
Abstract:
Rinser dryer system for rising process chemical from silicon or gallium arsenide wafers,...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5235995 Aug 17, 1993 Filed: Mar 6, 1991 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 7/665942 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 134105 |
Patent:
Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5221360 Jun 22, 1993 Filed: Jun 2, 1992 |
Raymon F. Thompson (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/893585 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 104 | 134 33 |
Patent:
Semiconductor processor methods
Abstract:
Rinser dryer system for rising process chemical from silicon or gallium arsenide wafers,...
Raymon Thompson Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5232328 Aug 3, 1993 Filed: Mar 5, 1991 |
Aleksander Owczarz (Kalispell, MT) Raymon F. Thompson (Kalispell, MT) | 7/665766 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B65H 7900 | 414222 |
Patent:
Robot loadable centrifugal semiconductor processor with extendible rotor
Abstract:
A processor for centrifugal processing of semiconductor wafers and similar units. The processor is ...
Raymon Thompson Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5174045 Dec 29, 1992 Filed: May 17, 1991 |
Raymon F. Thompson (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/703266 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F26B 1724 | 34 58 |
Patent:
Semiconductor processor with extendible receiver for handling multiple discrete wafers without...
Abstract:
A processor for centrifugal processing of semiconductor wafers and similar units without a wafer...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5357991 Oct 25, 1994 Filed: Apr 26, 1993 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 8/053523 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 1341021 |
Patent:
Gas phase semiconductor processor with liquid phase mixing
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the like ...
Timothy Reardon Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5235995 Aug 17, 1993 Filed: Mar 6, 1991 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 7/665942 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 134105 |
Patent:
Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the...
Timothy Reardon Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5377708 Jan 3, 1995 Filed: Apr 26, 1993 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 8/053524 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 134105 |
Patent:
Multi-station semiconductor processor with volatilization
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the like ...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5377708 Jan 3, 1995 Filed: Apr 26, 1993 |
Eric J. Bergman (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Raymon F. Thompson (Lakeside, MT) Aleksander Owczarz (Kalispell, MT) | 8/053524 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 310 | 134105 |
Patent:
Multi-station semiconductor processor with volatilization
Abstract:
Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the like ...
Raymon Thompson Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5154199 Oct 13, 1992 Filed: Feb 8, 1991 |
Raymon F. Thompson (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/653491 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 302 | 134111 |
Patent:
Semiconductor processor draining
Abstract:
Rinser dryer system for rising process chemical from silicon or gallium arsenide wafers,...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5154199 Oct 13, 1992 Filed: Feb 8, 1991 |
Raymon F. Thompson (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/653491 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B08B 302 | 134111 |
Patent:
Semiconductor processor draining
Abstract:
Rinser dryer system for rising process chemical from silicon or gallium arsenide wafers,...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Construction • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5575641 Nov 19, 1996 Filed: Jul 31, 1995 |
Aleksander Owczarz (Kalispell, MT) Ronald J. Ray (Kalispell, MT) Daniel L. Durado (Kalispell, MT) | 8/509704 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F27D 300 | 432 9 |
Patent:
Semiconductor processor opening and closure construction
Abstract:
A semiconductor processor including an enclosure with an access opening. A door assembly is...
Daniel Durado Kalispell, MT
Professions & Specialties
Semiconductor Processor • Construction • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5449289 Sep 12, 1995 Filed: Jun 30, 1993 |
Aleksander Owczarz (Kalispell, MT) Ronald J. Ray (Kalispell, MT) Daniel L. Durado (Kalispell, MT) | 8/086771 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F23M 700 | 432250 |
Patent:
Semiconductor processor opening and closure construction
Abstract:
A semiconductor processor including an enclosure with an access opening. A door assembly is...
Timothy Reardon Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5762751 Jun 9, 1998 Filed: Aug 17, 1995 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 8/516175 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | H01L 2100 | 156345 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Timothy Reardon Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6022484 Feb 8, 2000 Filed: Mar 23, 1998 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 9/046808 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | H01L 2100, B44C 122 | 216 67 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Construction • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5449289 Sep 12, 1995 Filed: Jun 30, 1993 |
Aleksander Owczarz (Kalispell, MT) Ronald J. Ray (Kalispell, MT) Daniel L. Durado (Kalispell, MT) | 8/086771 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F23M 700 | 432250 |
Patent:
Semiconductor processor opening and closure construction
Abstract:
A semiconductor processor including an enclosure with an access opening. A door assembly is...
Martin Bleck Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5762751 Jun 9, 1998 Filed: Aug 17, 1995 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 8/516175 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | H01L 2100 | 156345 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Ronald Ray Kalispell, MT
Professions & Specialties
Semiconductor Processor • Construction • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5449289 Sep 12, 1995 Filed: Jun 30, 1993 |
Aleksander Owczarz (Kalispell, MT) Ronald J. Ray (Kalispell, MT) Daniel L. Durado (Kalispell, MT) | 8/086771 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F23M 700 | 432250 |
Patent:
Semiconductor processor opening and closure construction
Abstract:
A semiconductor processor including an enclosure with an access opening. A door assembly is...
Ronald Ray Kalispell, MT
Professions & Specialties
Semiconductor Processor • Construction • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5575641 Nov 19, 1996 Filed: Jul 31, 1995 |
Aleksander Owczarz (Kalispell, MT) Ronald J. Ray (Kalispell, MT) Daniel L. Durado (Kalispell, MT) | 8/509704 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F27D 300 | 432 9 |
Patent:
Semiconductor processor opening and closure construction
Abstract:
A semiconductor processor including an enclosure with an access opening. A door assembly is...
Daniel Durado Kalispell, MT
Professions & Specialties
Semiconductor Processor • Construction • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5575641 Nov 19, 1996 Filed: Jul 31, 1995 |
Aleksander Owczarz (Kalispell, MT) Ronald J. Ray (Kalispell, MT) Daniel L. Durado (Kalispell, MT) | 8/509704 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | F27D 300 | 432 9 |
Patent:
Semiconductor processor opening and closure construction
Abstract:
A semiconductor processor including an enclosure with an access opening. A door assembly is...
Eric Bergman Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5762751 Jun 9, 1998 Filed: Aug 17, 1995 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 8/516175 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | H01L 2100 | 156345 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Eric Bergman Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6022484 Feb 8, 2000 Filed: Mar 23, 1998 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 9/046808 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | H01L 2100, B44C 122 | 216 67 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5431421 Jul 11, 1995 Filed: Mar 18, 1992 |
Raymon F. Thompson (Lakeside, MT) Timothy J. Reardon (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/855767 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B23B 3132, F23M 910 | 279139 |
Patent:
Semiconductor processor wafer holder
Abstract:
A wafer processor including a wafer support for holding semiconductor wafers. The wafer support...
Martin Bleck Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6022484 Feb 8, 2000 Filed: Mar 23, 1998 |
Martin C. Bleck (Kalispell, MT) Timothy J. Reardon (Kalispell, MT) Eric J. Bergman (Kalispell, MT) | 9/046808 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | H01L 2100, B44C 122 | 216 67 |
Patent:
Semiconductor processor with wafer face protection
Abstract:
A semiconductor processing station which utilizes a processing head and processing base which are...
Timothy Reardon Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5431421 Jul 11, 1995 Filed: Mar 18, 1992 |
Raymon F. Thompson (Lakeside, MT) Timothy J. Reardon (Kalispell, MT) Aleksander Owczarz (Kalispell, MT) | 7/855767 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B23B 3132, F23M 910 | 279139 |
Patent:
Semiconductor processor wafer holder
Abstract:
A wafer processor including a wafer support for holding semiconductor wafers. The wafer support...
Aleksander Owczarz Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#5409310 Apr 25, 1995 Filed: Sep 30, 1993 |
Aleksander Owczarz (Kalispell, MT) | 8/129700 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B01F 1504 | 366136 |
Patent:
Semiconductor processor liquid spray system with additive blending
Abstract:
A semiconductor processor blending system for diluting a concentrated liquid additive into an...
Jeffry Davis Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6599075 Jul 29, 2003 Filed: Jun 25, 2002 |
Jeffry A. Davis (Kalispell, MT) Kert L. Dolechek (Kalispell, MT) Gary L. Curtis (Kila, MT) | 10/180793 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B65G 4907 | 414217, 414937, 414939 |
Patent:
Semiconductor wafer processing apparatus
Abstract:
A processor for processing articles, such as semiconductor wafers, in a substantially clean...
Claim:
What is claimed is: 1. A processor for processing articles comprising: an enclosure for providing a ...
Kert Dolechek Kalispell, MT
Professions & Specialties
Semiconductor Processor • Semiconductors Professional
Experience & Education
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6599075 Jul 29, 2003 Filed: Jun 25, 2002 |
Jeffry A. Davis (Kalispell, MT) Kert L. Dolechek (Kalispell, MT) Gary L. Curtis (Kila, MT) | 10/180793 |
Semitool, Inc. (Kalispell, MT) |
| International Classification: | B65G 4907 | 414217, 414937, 414939 |
Patent:
Semiconductor wafer processing apparatus
Abstract:
A processor for processing articles, such as semiconductor wafers, in a substantially clean...
Claim:
What is claimed is: 1. A processor for processing articles comprising: an enclosure for providing a ...