1 result found
Dale Martin Hyde Park, VT
Professions & Specialties
Tailor
Experience & Education
United States Patent | Inventor | Appl. No. | Assignee |
---|---|---|---|
#6610607 Aug 26, 2003 Filed: May 25, 2000 |
Douglas S. Armbrust (Gloucester, MA) Dale W. Martin (Hyde Park, VT) Jed H. Rankin (Burlington, VT) Sylvia Tousley (South Burlington, VT) | 09/578362 |
International Business Machines Corporation (Armonk, NY) |
International Classification: | H01L 21461 | 438717, 438671 |
Patent:
Method to define and tailor process limited lithographic features using a modified hard mask process
Abstract:
A method to define and tailor process limited lithographic features is provided. The method may be...
Claim:
What is claimed is: 1. A method of forming a sub-photolithographic space between protruding...